P.G. Sennikov

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Gas discharges supported by millimeter wave beams generated by gyrotron are considered. Such discharges produce super high density plasma. Application of these discharges in the PECVD (plasma enhances chemical vapour deposition) technologies allow to increase the rate of activation of the gas medium sufficiently as compared with traditional microwave based(More)
The possibilities of using a microwave gas spectroscopy method for the investigation of impurities of silanes are considered in this paper. The absorption lines of known impurities at 2-mm wavelength range are analyzed. The presence of freons in tetrafluorosilane was experimentally found.
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