P. Duverneuil

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An electrochemical technique was tested in a laboratory scale to treat heavy metals (Cu2+, Cr6+ and Ni2+) from plating industrial effluent. The experiments were performed in a membrane reactor having a capacity of 1 l. Stainless-steel sheets with surface area of 0.011 m2 and titanium coated with ruthenium oxide were used as cathode and anode, respectively.(More)
We report in-situ doping of polysilicon grown on glass substrates by a LPCVD process. The growth rate, the resistivity and the dopant concentration of boron in-situ doped polysilicon layers are studied as a function of the deposition pressure and the dopant gas to silane mole ratio. A dependence of the axial uniformity on pressure and B2H6/S1H4 mole ratio(More)
This paper present a new kind of equipment called the annular reactor, which has been designed to treat a great number of substrates with a particularly good uniformity of thickness of deposits on the batch. Furthermore, a small scale pilot plant of this apparatus, called the sector reactor, has been built. It constitutes a very convenient laboratory piece(More)
An economical analysis of the LPCVD hot wall tubular reactor functioning is presented including equipment amortization, clean room location, supplies, maintenance, labor, gas and energy consumption. From a technical point of view, CVDl model is used to characterise the phenomena involved during polysilicon deposition, linking growth rate distribution to(More)
Recovery of copper from a synthetic solution with an initial copper concentration 1 g/l, pH 1 was investigated in a Pulsed Porous Percolated Electrode reactor (3PE). This reactor was constructed in the axial field configuration with 0.2 m diameter and 0.35 m height. Graphite particles were used as a voluminal cathode and a counter electrode made of titanium(More)
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