P. Beaumont

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It is widely understood that metrology (MTY) is a critical part of the semiconductor manufacturing process. It accelerates yield enhancement and maintains yield performance in both new and mature processes. In recent years, the semiconductor industry has increased its focus on this significant part of the semiconductor manufacturing process. Often we find(More)
Consistent with the semiconductor industry's focus on continuous improvement, increased throughput, and shorter cycle times, this paper describes a methodology for the qualification and quantification of speed loss at a toolset level. The identification and quantification of the speed loss categories, along with implementation of specific actions targeted(More)
Consistent with the Semiconductor Industry's focus on continuous improvement, increased throughput and shorter cycle times, this paper describes a methodology for the qualification and quantification of Speed Loss at a toolset level. In addition, a case study of an Etch AMAT toolset, which utilized this approach to equipment diagnostic analyses is reviewed.(More)
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