Osamu Fukumasa

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7th Asia Paciffic Conf. Plasma Sience and Technology / 17th Symp. Plasma Science for Materials, (2004), p.132. [7]Jeng-Kuei Chang, Heng-Yi Tsai, Wen-Ta Tsai: Journal of Power Sources 182(2008)317-322 [8] S. I. Choi, J. S. Nam, J. I. Kim, T. H. Hwang, J. H. Seo and S. H. Hong: Abstract 7th Asia Paciffic Conf. Plasma Sience and Technology / 17th Symp. Plasma(More)
In a plasma source development of a hydrogen pair-ion plasma consisting of only hydrogen atomic ions, H and H−, efficient production of the atomic ions is required. Hydrogen positive ions produced in a PIG discharge are supplied to a catalyst. The ions are converted to the atomic ions on the catalyst surface, and an ionic plasma with very low electron(More)
The relationship between enhancement of hydrogen negative ion H(-), volume production, and behaviors of fast primary electrons is studied theoretically. Trajectories of fast primary electrons are calculated, including collisional effects with hydrogen molecules. Active region of fast electrons depends strongly on the field intensity of the magnetic filter(More)
Volume production of D negative ions including isotope effects is studied in a rectangular arc chamber. Production and control of plasma parameters in D2 plasmas are performed by varying the intensity of the magnetic filter. The values of Te and ne in D2 plasmas are slightly higher than ones in H2 plasmas. Te in D2 plasmas cannot be decreased and is kept(More)
Using a grid bias method for plasma parameter control, volume production of hydrogen negative ions H(-) is studied in pure hydrogen rf plasmas. Relationship between the extracted H(-) ion currents and plasma parameters is discussed. It is confirmed that both high and low electron temperature T(e) plasmas are produced in the separated regions when the grid(More)
Pure volume production of D(-) negative ions is studied in rectangular negative ion source equipped with an external magnetic filter (MF). Plasma parameters (n(e) and T(e)) in D(2) plasmas are varied mainly in the downstream region by changing the magnetic field intensity of the MF (i.e., B(MF)). Production and control of D(2) plasma is nearly the same as(More)
Pure volume production of D negative ions is studied in rectangular negative ion source equipped with an external magnetic filter (MF). Production and control of D2 plasma with the MF is nearly the same as that of H2 plasmas. Plasma parameters (ne and Te) in D2 plasmas are varied mainly in the downstream region by changing the magnetic field intensity of(More)
The method of superposing the standing waves is the idea to generate VHF excited plasmas with excellent uniformity for large area processing. To get such plasmas, we generate two standing waves on the electrode, control the places of their own antinodes, and then, we superpose them. By using this method, VHF pure hydrogen plasmas are produced for various(More)
Volume production of hydrogen negative ion H(-) is studied in pure hydrogen plasmas using a grid bias method for plasma parameter control. The purposes of the present study are as follows. One is to investigate the possibility of controlling plasma parameters with a grid bias method in dc discharge plasmas; the other is to realize efficient negative ion(More)