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Abstract We investigate the effect of a nearby solid wall on a microfabricated resonating plate immersed in a fluid. This phenomenon, known as squeeze film damping, has long been studied with… Continue Reading
A resonant MEMS microsensor was developed to measure fluid density and viscosity. It consists of a thin plate made of a SOI top layer vibrating at resonance in its first bending mode. Its working… Continue Reading
A new capacitive microelectromechanical rotation sensor (R-MEMS) with very high performances (low noise, high bandwidth) was developed for oilfield applications. After a thorough design phase based… Continue Reading
A micro-device (100) comprising a movable member (111) movable relative to a fixed portion (115), formed in first and second layers of material (104, 106) disposed one above the other other such that… Continue Reading