Learn More
This paper investigates manipulation tasks with arrays of microelectromechanical structures (MEMS). We develop a geometric model for the mechanics of microactuators and a theory of sensorless, parallel manipulation , and we describe eecient algorithms for their evaluation. The theory of limit surfaces ooers a purely geometric characterization of microscale(More)
Programmable vector elds can be used to control a variety of exible planar parts feeders. These devices can exploit exotic actuation technologies such as ar-rayed, massively-parallel microfabricated motion pixels or transversely vibrating (macroscopic) plates. These new automation designs promise great exibility, speed, and dexterity|we believe they may be(More)
Programmable vector elds can be used to control a variety of exible planar parts feeders. These devices can exploit exotic actuation technologies such as arrayed, massively-parallel micro-fabricated motion pixels or transversely vibrating (macroscopic) plates. These new automation designs promise great exibility, speed, and dexterity|we believe they may be(More)
—Microneedle-based drug delivery has shown considerable promise for enabling painless transdermal and hypodermal delivery of conventional and novel therapies. However, this promise has yet to be fully realized due in large part to the limitations imposed by the micromechanical properties of the material systems being used. In this paper, we demonstrate(More)
A single-mask lateral tunneling accelerometer with integrated tip has been developed and characterized. High aspect ratio single-crystal silicon springs provide high resolution, wide operating bandwidth, and excellent isolation from off-axis stimuli. In this paper, we present the first such device implementing the SCREAM [1] process technology. We focus on(More)
This letter describes a simple method for three-dimensional microfabrication of complex, high-aspect-ratio structures with arbitrary surface height profiles in bulk silicon. The method relies on the exploitation of reactive ion etching lag to simultaneously define all features using a single lithographic masking step. Modulation of the mask pattern openings(More)
We report a technique for the alignment of self-assembled protein systems, such as F-actin bundles and microtubules, in a surface-modified titanium or silicon microfluidic device. Assembling filamentous protein systems in a confined geometry produces highly aligned samples for structural and mechanical studies. Biomolecular self-assembly can be investigated(More)
Arrays of electrostatic MEMS actuators have been fabricated using a modiied, multi-layer SCREAM Single-Crystal Reactive E tching and Metallization process. The devices consist of released, torsionally suspended grids with high aspect ratio single-crystal silicon SCS tips. They can be used to generate a force eld for the manipulation of small, at objects.(More)
A snap fastener is a deformable device consisting of a pair of mating surfaces that snap" together during assembly. Because of the simple, linear assembly motion , such latching micro fasteners have a wide range of applications in micro assembly tasks, e.g. for devices with multiple or layered components, or micro opto-mechanical plugs. At the micro scale,(More)