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A feature-rich second-generation 60-GHz transceiver chipset is introduced. It integrates dualconversion superheterodyne receiver and transmitter chains, a sub-integer frequency synthesizer, full programmability from a digital interface, modulator and demodulator circuits to support analog modulations (e.g. MSK, BPSK), as well as a universal I&Q interface(More)
This paper discusses high-performance planar suspended inductors for hybrid integration with microwave circuits. The inductors are fabricated using a silicon surface micromachining foundry process and assembled using flip-chip bonding. The silicon substrate is removed, leaving a metal inductor suspended 60 m above the microwave substrate, thus reducing the(More)
A picogram-sensitive optical microfluidic biosensor using an integrated polycarbazole photodiode is developed. The photodetector is mainly composed of the blend heterojunction of poly [N-9'-heptadecanyl-2,7-carbazole-alt-5,5-(4',7'-di-2-thienyl-2',1',3'-benzothiadiazole)] (PCDTBT) and [6,6]-phenyl C71-butyric acid methyl ester (PC70BM) and the(More)
The field of microfluidics has yet to develop practical devices that provide real clinical value. One of the main reasons for this is the difficulty in realizing low-cost, sensitive, reproducible, and portable analyte detection microfluidic systems. Previous research has addressed two main approaches for the detection technologies in lab-on-a-chip devices:(More)
Hollow nanoarchitectured materials with straight channels play a crucial role in the fields of renewable energy, environment and biotechnology due to their one-dimensional morphology and extraordinary properties. The current challenge is the difficulty on tailoring hollow nanoarchitectures with well-controlled morphology at a relatively low cost. As a(More)
Carbon nanotubes (CNTs) have been directly grown onto a silicon microsystem by a local synthesis method. This method has potential for wafer-level complimentary metal-oxide-semiconductor (CMOS) transistor-compatible integration of CNTs into more complex Si microsystems; enabling, e.g., gas sensors at low cost. In this work, we demonstrate that the(More)
Local synthesis and direct integration of carbon nanotubes (CNTs) into microsystems is a promising method for producing CNT-based devices in a single step, low-cost, and wafer-level, CMOS/MEMS-compatible process. In this report, the structure of the locally grown CNTs are studied by transmission imaging in scanning electron microscopy-S(T)EM. The(More)
This paper presents a novel method to analyze the thermal conductance under vacuum environment for MEMS devices. The Si/Ge-based Pirani gauge introduced is developed for monitoring the package hermeticity of MEMS Bolometer array, which has the total same structure as the single bolometer pixel for the characteristic of functional material. Meanwhile the(More)
Nanomaterials such as Carbon Nanotubes (CNTs) show a long range of properties opening for new applications, but their integration into microsystems remains a challenge for widespread use as functional materials in electronics and smart systems. This paper presents our work towards a process for making complete, integrated CNT / CMOS / MEMS systems. We(More)
This paper presents work towards heterogeneous integration of high-efficiency power amplifiers (PAs) with tuner and biasing circuits implemented with micro-electro-machined elements. The PAs operate in switched mode with over 70% efficiency at X-band. Many such switched-mode amplifiers are used as the active portion of spatial power combining antenna(More)