Learn More
— A feature-rich second-generation 60-GHz transceiver chipset is introduced. It integrates dual-conversion superheterodyne receiver and transmitter chains, a sub-integer frequency synthesizer, full programmability from a digital interface, modulator and demodulator circuits to support analog modulations (e.g. MSK, BPSK), as well as a universal I&Q interface(More)
—This paper discusses high-performance planar suspended inductors for hybrid integration with microwave circuits. The inductors are fabricated using a silicon surface microma-chining foundry process and assembled using flip-chip bonding. The silicon substrate is removed, leaving a metal inductor suspended 60 m above the microwave substrate, thus reducing(More)
The field of microfluidics has yet to develop practical devices that provide real clinical value. One of the main reasons for this is the difficulty in realizing low-cost, sensitive, reproducible, and portable analyte detection microfluidic systems. Previous research has addressed two main approaches for the detection technologies in lab-on-a-chip devices:(More)
Carbon nanotubes (CNTs) have been directly grown onto a silicon microsystem by a local synthesis method. This method has potential for wafer-level complimentary metal-oxide-semiconductor (CMOS) transistor-compatible integration of CNTs into more complex Si microsystems; enabling, e.g., gas sensors at low cost. In this work, we demonstrate that the(More)
Local synthesis and direct integration of carbon nanotubes (CNTs) into microsystems is a promising method for producing CNT-based devices in a single step, low-cost, and wafer-level, CMOS/MEMS-compatible process. In this report, the structure of the locally grown CNTs are studied by transmission imaging in scanning electron microscopy—S(T)EM. The(More)
Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. To copy otherwise, to republish, to post on servers or to redistribute to(More)
This paper presents a novel method to analyze the thermal conductance under vacuum environment for MEMS devices. The Si/Ge-based Pirani gauge introduced is developed for monitoring the package hermeticity of MEMS Bolometer array, which has the total same structure as the single bolometer pixel for the characteristic of functional material. Meanwhile the(More)
– This paper describes a novel fabrication approach using Atomic Layer Deposition (ALD) of dielectric materials to protect and coat released MEMS devices. The nature of ALD film ensures coverage on all sides of a released MEMS device and is done at a relatively low temperature (down to 150 o C). The ALD film thickness can be precisely controlled as each(More)
Date The final copy of this thesis has been examined by the signatories, and we find that both the content and the form meet acceptable presentation standards of scholarly work in the above mentioned discipline. In recent years, there has been a great deal of interest in MEMS reconfigurable circuits for applications in miniaturized multifunctional microwave(More)
Nanomaterials such as Carbon Nanotubes (CNTs) show a long range of properties opening for new applications, but their integration into microsystems remains a challenge for widespread use as functional materials in electronics and smart systems. This paper presents our work towards a process for making complete, integrated CNT / CMOS / MEMS systems. We(More)