Nico F. de Rooij

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A new probe made entirely of plastic material has been developed for scanning probe microscopy. Using a polymer for the cantilever facilitates the realization of mechanical properties that are difficult to achieve with classical silicon technology. The new cantilever and tip presented here are made of an epoxy-based photoplastic. The fabrication process is(More)
This paper presents the fabrication of a microchemical chip for the detection of fluorescence species in microfluidics. The microfluidic network is wet-etched in a Borofloat 33 (Pyrex) glass wafer and sealed by means of a second wafer. Unlike other similar chemical systems, the detection system is realized with the help of microfabrication techniques and(More)
Multiple single-lever probes for scanning force microscopy arranged in a cassette design and made of a low-stiffness photoplastic material have been developed and successfully tested by imaging DNA molecules. The new concept consists of a column of a one-dimensional array of cantilevers with integrated tips, the first of which is used for imaging and the(More)
A tin dioxide (SnO2) sensor was fabricated by inkjet printing onto polyimide foil. Gold electrodes and heater were printed on each side of the substrate. A SnO2 based ink was developed by sol-gel method and jetted onto the electrodes. A final annealing at 400°C compatible with the polymeric transducers allowed to synthetize the SnO2 sensing film. Electrical(More)
We present a portable microsystem to quantitatively detect cocaine in human saliva. The chip combines a simple microfluidic method for multiphase liquid-liquid extraction to transfer cocaine from IR-light absorbing saliva to an IRtransparent solvent with the on-chip cocaine detection by IR-waveguide-spectroscopy (QC-laser, waveguide, detector). With our(More)
Jean-Christophe Roulet Reinhard Völkel Hans Peter Herzig Elisabeth Verpoorte Nico F. de Rooij René Dändliker, MEMBER SPIE University of Neuchâtel Institute of Microtechnology rue A.-L Breguet 2 CH-2000 Neuchâtel, Switzerland E-mail: Abstract. Micro-optical systems based on refractive microlenses are investigated. These(More)
We report on the first successful operation of a scanning force microscope using microfabricated capacitive force sensors. The sensors, which are made from single crystal silicon on insulator wafers, consist of a cantilever spring with integrated tip at the free end and an electrically insulated counter electrode. Dynamic force gradient sensing is the(More)
We developed a micromachining process for the fabrication of highly sensitive capacitor probes to be used for displacement measurement of an atomic force cantilever. The capacitive structure consists of two adjacent single-crystal silicon beams, one carrying a sharp tip for the force interaction, the other being the counter-electrode. The air gap of 1.5 pm(More)
We present the development, testing and characterization of a low-power chip-scale Rubidium (Rb) plasma light source designed to serve for optical pumping in miniature atomic clocks. The technique used is electrodeless capacitively coupled plasma (CCP) discharge, driven in a microfabricated Rb vapor cell. The device is electrically driven at frequencies(More)