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A new method for fabrication of diffractive structures, which we call quasi-direct writing, is illustrated. The diffractive structures can be generated by changing the pixel spacing along the direction of the cross scan (with zero overlap) and keeping the pixel spacing constant along the other scan direction, with a normal overlap of 50%-60%, while the(More)
The design, microfabrication, and testing of a hybrid microdiffractive-microrefractive lens with a continuous relief that is used with a laser diode for monomode fiber coupling is discussed. The hybrid microlens with a diameter as small as 65 mum and a numerical aperture of 0.25 is fabricated directly onto a spherical surface by use of focused-ion-beam(More)
A nanopore array with diameter of approximately 30 nm was fabricated by use of focused ion beam (FIB) scanning and thin film coating on Si(100). A thin film of SiO2 with thickness of 200 nm (used as sacrificial layer) was coated by physical evaporation deposition (PVD) first. Next, the thin films of Aluminum with thickness of 500 nm were coated on the(More)
A new fabrication method for a sinusoidallike structure is described. The sinusoidal structure can be spontaneously self-formed on the surface of a substrate by focused ion-beam bombardment with raster scanning and an ion incident angle perpendicular to the sample surface (normal incidence). The substrate material is a silicon wafer coated with 2-mum-thick(More)
A new one-step method, which has been named self-organized formation, for microfabrication of blazed-grating-like structures after bombardment with a focused ion beam (FIB) with an ion energy of 50 keV and a beam current of 0.5 nA is presented. The structure is fabricated by the FIB by raster scanning (not by patterned scanning) upon a substrate of a(More)
A new design is presented to achieve a hybrid micro-diffractiverefractive lens with wide field of view (WFOV) of 80 degrees integrated on backside of InGaAs / InP photodetector for free space optical interconnections. It has an apparent advantage of athermalization of optical system which working in large variation of ambient temperature ranging from -20(More)
Astigmatism exists in a focused-ion-beam (FIB) system and causes the shape of a beam spot to change from a normal circle to an ellipse. This variation influences the fabrication of diffractive structures ?by use of programmable controlled milling of a FIB. It is analyzed combined with the fabrication of blazed gratings and Fresnel diffractive lenses.(More)
A one-step method for microfabrication of a diffractive lens mold with continuous relief, including a solgel process for replication, is presented. The mold is fabricated by focused ion beam milling (FIBM) on a substrate of bulk silicon and is then used directly for replication of the diffractive structure by means of a hybrid solgel glass stamping process.(More)
In a novel one-step process, a vertical-cavity surface-emitting laser (VCSEL, operation wavelength of 980 nm) is integrated with a hybrid microdiffractive lens by focused ion beam milling (FIBM) for use in freespace optical links. A hybrid microlens with a diameter of 100 m, numerical aperture of 0.56, and sag height of 4.196 m, combined with a diffractive(More)