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Re-configurable fluid circuits by PDMS elastomer micromachining
We report on a microfabrication technique for realizing re-configurable micro fluidics devices using polymethylsiloxane material (PDMS). The mechanical characteristics of the material, including theExpand
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Physical And Reduced-Order Dynamic Analysis of MEMS
In this paper, we first present an efficient physical level simulationmethod for the dynamic analysis of electrostatic micro-electro-mechanicalsystems (MEMS). Expand
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Atomistic simulations on the mechanical properties of a silicon nanofilm covered with graphene
Abstract Molecular dynamics simulations are used to investigate the mechanical properties of a silicon nanofilm covered with graphene. Our results show that graphene can enhance the mechanicalExpand
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Accuracy issues in a high-level model for MEMS varactors
We present accuracy issues for an equivalent circuit model and an AHDL model (high-level models) of MEMS varactors. Expand
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Circuit modeling and simulation of integrated microfluidic systems
A combined circuit-device model for the analysis of integrated microfluidic system is presented. The complete model of an integrated microfluidic device incorporates modeling of the fluidicExpand