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Real-time monitoring of the cure state of sprayed paint is important for industrial painting processes to determine appropriate leveling and drying times. Paints contain pigment, resin, solvent, and other additives. The solvent is generally conductive and is finally evaporated during the paint curing process, which results in a change in the electrical(More)
To reduce critical dimension (CD) variation due to multiple interference effect, anti-reflective coatingl) and over coating processes2) have been proposed and investigated. In this paper, we discuss the problem of the over coating processes and report a new and simple process, called OCT (Optical-path Control Technique), for reducing the multiple(More)
Real-time monitoring of the cure state of sprayed paint is important for industrial painting processes to determine appropriate leveling and drying times. Paints contain pigment, resin, solvent, and other additives. The solvent is generally conductive and is finally evaporated during the paint-curing process, which results in a change in the electrical(More)
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