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  • N. Kroehn
  • 2004 IEEE/SEMI Advanced Semiconductor…
  • 2004
This paper is focusing specifically on the issue of forced tool idle time due to operator delays. It explores the impact of staffing levels on cycle time, and gives examples from simulation models that show how operator delays can lead to forced idle time on tools, even at relatively low levels of operator loading. On the basis of several simulation studies(More)
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