N. Kontaras

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— This paper studies the properties of a variable gain integrator with reset, i.e. a nonlinear lag filter that is obtained by a) saturating the input, b) filtering the saturated input with a Clegg integrator, and c) add the filtered output to the unsaturated input before applying it to a PID-based controller. Depending on the amount of saturation, the(More)
The implementation of lightweight high-performance motion systems in lithography and other applications imposes lower requirements on actuators, amplifiers, and cooling. However, the decreased stiffness of lightweight designs increases the effect of structural flexibilities especially when the point of interest is not at a fixed location. This is for(More)
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