Munetoyo Iida

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Nanoimprint lithography (NIL) provides a major breakthrough in nanopatterning because it produces nanometer features over a large area with high throughput and low cost. There are a lot of NIL studies, however, all of them are concerned with two dimensional pattern transfers. Fine three-dimensional (3D) fabrication process is now required and studied for(More)
Quartz is optimum material for micro reactor because of its chemical resistance and high mechanical strength. However, efficient fabrication process of micro-order flow channel on quartz is difficult. We developed nanometer-order depth gradation (3-dimensional) fabrication process for spin-on-glass (SOG) resist using accelerating voltage modulation electron(More)
In order to understand comprehensively the role of the n=1 instability and relaxa generation processes in helicity-driven spherical systems, we have investigated dynamics produced in the HIST device by decreasing the external toroidal field (TF) and reversing its result, we have discovered that the ST relaxes towards flipped ST configurations throug(More)
We discuss an alternate method for calcification in microcapillaries for fabricating calcium phosphate films using silicone molds and calcifying solutions. Calcium phosphate films with a line/space of 5-50 µm were fabricated by controlling the concentrations of calcium chloride and sodium phosphate solutions. Plate-type crystals of hydroxyapatite were grown(More)
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