Motoki Nakashima

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In order to fabricate a highly reliable InGaZnO-TFT, it is important to form a highly crystalline InGaZnO film with few defects. Evaluation of the crystallinity of InGaZnO is necessary for improving a reliability of InGaZnO-TFT. This paper presents comparison of crystallinities among three kinds of InGaZnO films, which are a CAAC-InGaZnO film having c-axis(More)
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