Mitsuyoshi Akiyama

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We report, for the first time, the measurement of the temperature dependence of the piezoelectric coefficient, d/sub 33/, of aluminum nitride sputtered on a silicon substrate under a high temperature of up to 300/spl deg/C, and that d/sub 33/ shows the same value of 5 pC/N between 20/spl deg/C and 300/spl deg/C. A highly c-axis oriented aluminum nitride(More)
This paper presents a novel application of a flexible piezoelectric film sensor to non-invasive fault diagnosis of industrial pipe systems. This sensor is made of oriented aluminum nitride (AlN) thin film, and the total thickness is less than 40 mum. Flexibility of this sensor facilitates installing to surfaces of pipes. Using this sensor, pressure(More)
An earthquake of JMA magnitude 6.5 (first event) hit Kumamoto Prefecture, Japan, at 21:26 JST, April 14, 2016. Subsequently, an earthquake of JMA magnitude 7.3 (second event) hit Kumamoto and Oita Prefectures at 01:46 JST, April 16, 2016. An out-of-service Kyushu Shinkansen train carrying no passengers traveling on elevated bridges was derailed by the first(More)
We have developed an ultrasonic probe with a film-type pressure sensor installed on its contact surface. The film-type pressure sensor, which uses aluminum nitride (AlN) as a piezoelectric material, is thin, flexible, durable and heat-resistant. The AlN is deposited on a polyimide film in high orientation using the sputtering method. The sensor can measure(More)
The performance of corrosion-affected RC members depends strongly on localized damages of reinforcement. Therefore, modeling the spatial variability of steel corrosion is very important for the assessment of the remaining service life of corroded structures or time for maintenance. To study the changes of spatial variability of steel weight loss over time,(More)
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