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We present a new monolithic silicon photonics technology suited for integration with standard bulk CMOS processes , which reduces costs and improves opto-electrical coupling compared to previous approaches. Our technology supports dense wavelength-division multiplexing with dozens of wavelengths per waveguide. Simulation and experimental results reveal an… (More)
We demonstrate a monolithic photonic integration platform that leverages the existing state-of-the-art CMOS foundry infrastructure. In our approach, proven XeF2 post-processing technology and compliance with electronic foundry process flows eliminate the need for specialized substrates or wafer bonding. This approach enables intimate integration of large… (More)
A new general class of optical interferometers is proposed, and the physical principle of their operation is explained. They split the spectrum entering one input port among the interferometer arms in an arbitrarily chosen wavelength- and/or time-dependent manner but guarantee broadband constructive interference into a single output port by symmetry. The… (More)
This paper presents photonic devices with 3 dB/cm waveguide loss fabricated in an existing commercial electronic 45 nm SOI-CMOS foundry process. By utilizing existing front-end fabrication processes the photonic devices are monolithically integrated with electronics in the same physical device layer as transistors achieving 4 ps logic stage delay, without… (More)
We demonstrate the first photonic chip designed in a commercial bulk CMOS process (65 nm node) using standard process layers combined with scalable post-processing, enabling dense photonic integration with high-performance microprocessor electronics.
The goal of the research program that we describe is to break the emerging performance wall in microprocessor development arising from limited band-width and density of on-chip interconnects and chip-to-chip (processor-to-memory) electrical interfaces. Complementary metal-oxide semiconductor compatible photonic devices provide an infrastructure for… (More)
We demonstrate 20nm thermo-optic tuning in silicon microring resonators with 16nm free spectral range (FSR), the largest reported full-FSR thermal tuning, with a tuning efficiency of 28μW/GHz, enabling telecom microphotonic tunable filters.
Integrated photonic interconnect technology presents a disruptive alternative to electrical I/O for many VLSI applications. Superior bandwidth-density and energy efficient operation can be realized through dense wavelength-division multi-plexing (DWDM) and lower transmission losses. There are two main paths towards an integrated platform.… (More)