This paper presents photonic devices with 3 dB/cm waveguide loss fabricated in an existing commercial electronic 45 nm SOI-CMOS foundry process. By utilizing existing front-end fabrication processes the photonic devices are monolithically integrated with electronics in the same physical device layer as transistors achieving 4 ps logic stage delay, without… (More)
Low-loss, compact, broadband silicon-waveguide crossing arrays and active structures are proposed based on periodicity-matched multimode focusing. Simulations show loss of 0.045dB/crossing and >200nm bandwidth in a typical example. Correspondence to low-loss, structure-matched Bloch-waves is demonstrated. Strong-confinement (SC) waveguides based on high… (More)
A novel post-processing fabrication technique, based on XeF 2 etching, has been developed to locally remove the silicon substrate beneath polysilicon waveguides, enabling integration of low-loss strong-confinement microphotonics into standard bulk-silicon CMOS process flows.
We demonstrate the first photonic chip designed in a commercial bulk CMOS process (65 nm node) using standard process layers combined with scalable post-processing, enabling dense photonic integration with high-performance microprocessor electronics.
579 commentary What is — and what is not — an optical isolator The quest for on-chip optical isolators has recently spawned many new isolator structures. However, there has been some confusion about the requirement of nonreciprocity. Here, we review the essential characteristics of an isolator. O ptical isolators are devices that block light in one… (More)
Data transport across short electrical wires is limited by both bandwidth and power density, which creates a performance bottleneck for semiconductor microchips in modern computer systems--from mobile phones to large-scale data centres. These limitations can be overcome by using optical communications based on chip-scale electronic-photonic systems enabled… (More)
Perfectly matched layers are used for finite-difference computation of complex-frequency leaky modes of resonant dielectric structures in cylindrical and Cartesian coordinates. Examples of dielectric-halfspace-perturbed 3D rings and 2D round, square and coupled resonators are given. Resonant dielectric structures play an instrumental role in high-density… (More)
We demonstrate the first (to the best of our knowledge) depletion-mode carrier-plasma optical modulator fabricated in a standard advanced complementary metal-oxide-semiconductor (CMOS) logic process (45 nm node SOI CMOS) with no process modifications. The zero-change CMOS photonics approach enables this device to be monolithically integrated into… (More)
Rigorous electromagnetic simulations are used to design high-index-contrast microring-resonator filters. The first fabricated third-order filters compensated for passband distortion due to coupling-induced and fabrication-related frequency shifts demonstrate a 20nm FSR and the highest reported thru-port extinction (14dB).
Advances in microring-resonator-based photonic structures and novel architectures are described that demonstrate the first low-loss telecom-grade filters, wide tuning, polarization transparency, and fully transparent (dispersion-free) wavelength switching using high-index-contrast (SiN-and Si-core), strong-confinement waveguides. A large number of… (More)