Michael W. Lane

Learn More
Ultra low-k (ULK, k=2.4) dielectric has weaker mechanical properties than first generation low-k films (k=3.0). The introduction of ULK into advanced back end of lines (BEOL) presents a significant challenge due to chip package interaction (CPI) where the packaged die is cycled over a temperature range and the resulting stress can cause ULK BEOL(More)
  • 1