Michael T. Dugger

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Wear is a critical factor in determining the durability of microelectromechanical systems (MEMS). While the reliability of polysilicon MEMS has received extensive attention, the mechanisms responsible for this failure mode at the microscale have yet to be conclusively determined. We have used on-chip polycrystalline silicon side-wall friction MEMS specimens(More)
Humidity is shown to be a strong factor in the wear of rubbing surfaces in polysilicon micromachines. We demonstrate that very low humidity can lead to very high wear without a significant change in reliability. We show that the volume of wear debris generated is a function of the humidity in an air environment. As the humidity decreases, the wear debris(More)
As the size of mechanical systems shrinks from macro- to nanoscales, surface phenomena such as adhesion, friction, and wear become increasingly significant. This paper demonstrates the use of alcohol adsorption as a means of continuously replenishing the lubricating layer on the working device surfaces and elucidates the tribochemical reaction products(More)
UV ozone and oxygen plasma treatments are two common procedures for cleaning silicon surfaces. The extent to which hidden surfaces of microelectromechanical systems (MEMS) are cleaned by these methods has not been well documented. To probe and compare the effectiveness of the two methods for cleaning occluded regions in MEMS, devices consisting of large(More)
The authors report tribochemical changes due to sliding of a silicon nitride Si3N4 ball against an ultrananocrystalline diamond UNCD thin film. Unidirectional sliding wear measurements were conducted for 2000 cycles using a ball-on-disk apparatus with a 3/16 in. diameter Si3N4 ball at a sliding speed of 3.3 mm/s and a normal load of 98.0 mN nominal Hertzian(More)
The origin and role of tribochemical reaction products formed while sliding silicon oxide surfaces in the presence of adsorbed alcohol molecules in equilibrium with the vapor phase were studied. Wear and friction coefficient studies with varying contact loads and n-pentanol vapor environments were used to determine under what operating conditions the(More)
The synthesis of two new polyphenylene vinylene (PPV) precursor polymers which can be thermally induced to eliminate pentanol is presented. Pentanol has recently been discovered to be a very useful lubricant in MicroElectroMechanical Systems. The utilization of the elimination reaction of precursor polymers to PPV as a small molecule delivery platform has,(More)
ADVANCED MATERIALS & PROCESSES • MAY 2014 32 F rom the 1960s through the early 1990s, large government investments in space exploration by both the U.S. and the former Soviet Union emphasized performance, while factors such as cost and aging requirements were secondary. Spacecraft were launched soon after they were completed and tested, and traveled for(More)
The degradation in electrical contact resistance of a contact pair sliding while submerged in silicone fluid has been investigated. While the contamination of electrical contacts by silicone vapors or migrating species at elevated temperature due to decomposition in electric arcs is well known, the present degradation mechanism appears to arise from(More)