Michael D. Sinanis

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Widely tunable, high-isolation W-band bandstop filters realized with evanescent-mode resonators are presented. These filters exhibit large notch depths of up to 70 dB, with 3-dB bandwidths as narrow as 1.5% and out-of-band insertion loss of less than 3.25 dB. Two filters are presented, which have 75-103 GHz and 96-108 GHz tuning ranges. These filters are(More)
A hierarchical manifold microchannel heat sink is used to dissipate heat from a small hotspot region superposed on a larger region of uniform background heat flux. A 5 mm × 5 mm overall chip footprint area is cooled using a 3 × 3 array of intrachip silicon microchannel heat sinks fed in parallel using a manifold distributor. Each heat sink(More)
This paper reports on a novel hybrid integration concept that enables the realization of high-quality (Q) factor, low-frequency coaxial cavity resonators with well-defined capacitive-loading and variable center frequency. It is based on a silicon-micromachined spacer that is mounted on top of a conventional CNC-machined metallic cavity to functionalize the(More)
A 22-43 GHz tunable bandstop filter is presented, with relevant background theory, design methodology explained. The filter employs silicon-micromachined evanescent-mode cavity resonators, tuned by low-power electrostatic actuators. Low passband of insertion loss of less than 2 dB is obtained, and high stopband attenuation of over 60 dB is achieved by using(More)
This paper presents new microcorrugated diaphragms (MCDs) capable of achieving large displacements (>20 μm) with the lowest reported stress relaxation today. These MCDs are fabricated by co-sputtering of gold (Au) and vanadium (V) followed by a 2-hour annealing at 300 °C. Compared to conventional RF MEMS sputtered Au films, the reported(More)
A cold-plasma-based technique for tuning an evanescent-mode cavity resonator is introduced and studied experimentally for the first time in this paper. The technique involves a plasma jet that constitutes a variable resistance integrated in the cavity. The electron density and consequently the electromagnetic properties of plasma, including its resistivity,(More)
Power limiting behavior of a cold plasma jet when introduced in an evanescent-mode (EVA) resonator is experimentally investigated in this paper. The plasma jet generates a pre-ionized region over the post of the cavity where most of the electric field is concentrated on. Due to pre-ionization, microwave breakdown occurs at a lower power level compared with(More)
An edge-smoothing technique for decreasing field emission and therefore increasing power handling in silicon-based cavity resonators is introduced for the first time in this paper. Specifically, this edge-smoothing process is performed in loaded evanescent-mode resonators by oxidizing the silicon surface before metal coating is applied. This process(More)
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