Michael A Kokarev

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The determination of optical parameters of thin films from experimental data is a typical task in the field of optical-coating technology. The optical characterization of a single layer deposited on a substrate with known optical parameters is widely used for this purpose. Results of optical characterization are dependent on not only the choice of the(More)
We present an indirect broadband optical monitoring approach based on using several witness substrates that are brought to a measurement position in a special sequence. Different witness substrates are used to monitor not groups of successive design layers but specially chosen design layers. An attractive feature of the presented monitoring approach is the(More)
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