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—We present the first design, fabrication and testing results from an Electrohydrodynamic (EHD) micropump on a flexible Parylene-C substrate. Parylene-C membranes with their excellent properties are rarely used yet are very promising candidates as flexible substrates. Low power on-chip micropumps are needed in various fields including biotechnology and(More)
—We present the first design, fabrication and testing results from a three dimensional Multi-Walled Carbon Nanotube based thermal sensor fabricated on a flexible Parylene-C substrate. Parylene-C is an inert, biocompatible, optically transparent, room temperature deposited polymer with a high mechanical strength, yet is rarely used as a flexible substrate.(More)
BACKGROUND Potential routes of nanomaterial exposure include inhalation, dermal contact, and ingestion. Toxicology of inhalation of ultra-fine particles has been extensively studied; however, risks of nanomaterial exposure via ingestion are currently almost unknown. Using enterocyte-like Caco-2 cells as a small intestine epithelial model, the possible(More)
In this paper, we present a flexible parylene-C shadow mask technology for creating microscale patterns on flat and curved surfaces. The smallest feature size of 4 µm is demonstrated and the technology is scalable up to full wafer size. With the addition of SU-8 pillars, we also demonstrate multi mask processing with an alignment accuracy of about 5-6 µm.(More)
A reusable high aspect ratio parylene-C shadow mask technology for diverse micropat-terning applications, Sens. Abstract In this paper, we present a low cost, flexible and reusable parylene-C shadow mask technology for diverse micropatterning applications. The smallest feature size of 4 ␮m is demonstrated and the technology is scalable up to full wafer(More)
We present a hybrid approach that combines top-down fabrication with bottom-up directed assembly for making single-walled carbon nanotube (SWNT) based three-dimensional interconnects. The SWNTs are assembled using dielectrophoresis at room temperature on a microfabricated 3D platform. The two-terminal resistance of the assembled SWNTs at 10 Vpp assembly(More)
We demonstrate experimentally negative refraction by a photonic crystal prism and imaging of a point source by a photonic crystal slab at 1.5 microm wavelength. The photonic crystal structures were nanofabricated in a InGaAsP/InP heterostructure platform, and optical characterization was performed using a near-field scanning optical microscope. By designing(More)
—This paper presents a linear array of tilting mirrors used to attenuate the various wavelengths in a DWDM optical signal. Attenuation of 21 dB at snap-down was achieved by the tilting mirrors, substituting for a liquid crystal spatial light modulator (SLM) in a commercial dynamic spectral equalizer (DSE). Linear fill factor of 92% was achieved, allowing(More)
In this paper, we present the fabrication of nano optical elements by means of deep reactive ion etching technique (Bosch process) on a silicon-on-insulator substrate. The nano structures are fabricated in a two step process. The first step consists of direct-writing nanoscale patterns on PMMA polymer by electron beam lithography. These nano patterns are(More)