Mehdi Rowshannahad

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Qualification and batch size constraints are two important characteristics of many toolsets in semiconductor manufacturing. In this paper, we consider the impact of batch size constraint on two flexibility measures used for qualification management. We propose several solution approaches that consider batch sizes when balancing the workload on machines in(More)
Variability is an inherent component of all production systems. To prevent variability propagation through the whole production line, variability must be constantly monitored, especially for bottleneck toolsets. In this paper, we propose measures to evaluate workload variability for a toolset configuration. Using industrial data, we show how making the(More)
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