Matthias Schreiter

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Sensor arrays are a key tool in the field of neuroscience for noninvasive recording of the activity of biological networks, such as dissociated neurons or neural tissue. A high-density sensor array complementary metal–oxide–semiconductor chip is presented with 16 K pixels, a frame rate of 2 kiloframes per second, and a pitch of 7.8 m 7.8 m for imaging of(More)
Solidly mounted film bulk acoustic resonators (FBAR) operating at 850 MHz in the shear vibration mode have been fabricated. C-axis inclined zinc oxide (ZnO) thin films realized by modified reactive magnetron sputtering were used. Coupling factors k/sup 2/ of 1.7% and Q-factors of 312 were determined in air. Q-factors of 192 were measured in water, making(More)
A CMOS-based microelectrode array (MEA) with 4225 recording sites and 1024 stimulation sites and a related data acquisition system are presented. The chip provides high spatiotemporal resolution on an active area of 1 mm × 1 mm or 2 mm × 2 mm, respectively, and allows in-vitro neural tissue interfacing experiments with full imaging capability.(More)
A novel integrated bio-sensor technology based on thin-film bulk acoustic wave resonators on silicon is presented and the feasibility of detecting DNA and protein molecules proofed. The detection principle of these sensors is label-free and relies on a resonance frequency shift caused by mass loading of an acoustic resonator, a principle very well known(More)
A CMOS-compatible process is presented which allows to realize sensor arrays for non-invasive, extracellular, high density, long term recording of neural activity. A high-permittivity biocompatible dielectric is used to capacitively couple nerve cell-induced biological signals to the CMOS circuitry-based electronic world. The transducer consists of a multi(More)
Solidly mounted (SMR-type) thin film bulk acoustic resonators operating at 2.2, 4.1, and 8.0 GHz and with lateral extents from 30 to 500 mum were fabricated and their performance as mass sensors was evaluated theoretically as well as experimentally. It was found that increasing the frequency leads to a principally improved performance of these devices.(More)
ZnO thin films where the c-axis is inclined with respect to the surface normal are of interest for the excitation of shear-modes in bulk acoustic wave (BAW) devices, especially when operation in liquids is desired, e.g. for bio-sensing. In this work, a technique to deposit 16° inclined ZnO by reactive sputtering using an additional blind is presented. It is(More)
A CMOS sensor array for monitoring neural signals of living cells with 128 /spl times/ 128 pixels in a 1 mm/sup 2/ area is described. A standard 0.5 /spl mu/m, 5 V CMOS process extended by top electrodes covered by a relatively thin bio-compatible dielectric is used. Detection circuitry is based on a sensor-MOSFET mismatch-compensating current-mode(More)
The paper reports the system design of a piezoelectric energy harvesting module for a tire based wireless sensor node application. Impacts of material propertie, generator design and power management circuitry are considered. In context of a non-resonant generator excitation scheme, dissipative damping mechanisms are investigated. In particular air damping(More)