Matthias Mohaupt

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Multi shaped beam lithography requires the precise and durable alignment and fixation of MEMS based Multi Deflection Arrays on stable ceramic system platforms using vacuum and high temperature compatible interconnection and joining technologies. Micron accuracy during assembly is accomplished by mark detection using image processing and 3DOF alignment(More)
The alignment procedure is an important step in the process chain of the assembly of micro-optical components and has a direct impact on the system performance of the micro-optical system, the necessary assembly time and the manufacturing costs. For these reasons, only alignment procedures that are adapted to the special requirements of each assembly task(More)
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