Masayuki Furumiya

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This paper presents very small on-chip vertically coiled solenoid inductors (V-solenoid) using 90nm CMOS multilevel interconnect technology. In addition, a variety of areas-saving (10um × 20um) transformers without any additional processing steps are demonstrated: a V-solenoid surrounded by another different inside-diameter V-solenoid (dual-tube(More)
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