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In plasma-based deposition processing, the importance of low-energy ion bombardment during thin film growth can hardly be exaggerated. Ion bombardment is an important physical tool available to… Continue Reading
The energy distribution of sputtered and ionized metal atoms as well as ions from the sputtering gas is reported for a high power impulse magnetron sputtering (HIPIMS) discharge. High power pulses ...
In this study, the effect on thin film growth due to an anomalous electron transport, found in high power impulse magnetron sputtering (HiPIMS), has been investigated for the case of a planar… Continue Reading
Current and voltage have been measured in a pulsed high power impulse magnetron sputtering (HiPIMS) system for discharge pulses longer than 100 mu s. Two different current regimes could clearly be ...
Abstract We achieve control over the transition from a magnetically confined (magnetron) glow discharge to an arc discharge operating on a carbon cathode by applying constant voltage square wave… Continue Reading
X-ray photoelectron spectroscopy (XPS) spectra of sputter-etched nc-TiC/a-C nanocomposite thin films published in literature show an extra feature of unknown origin in the C1s region. This feature is… Continue Reading
In order to improve the adhesion of hard coatings such as CrN, a surface pretreatment by the novel high power impulse magnetron sputtering (HIPIMS) technique followed by reactive unbalanced d.c. ma… Continue Reading
Abstract Thin films of silicon nitride (Si 3 N 4 ) and silicon carbide (SiC) have been deposited by radio frequency (r.f.) magnetron sputtering of stoichiometric targets in non-reactive argon and in… Continue Reading
We demonstrate the deposition of fully dense, stoichiometric TiN films on amorphous SiO2 by reactive high power impulse magnetron sputtering (HiPIMS) in the absence of both substrate heating and… Continue Reading
Abstract Cemented carbides with sub-micron grain size have increased the need to restrict grain growth during sintering. Commonly used inhibitors like V, Ti, and Cr have been observed to form… Continue Reading