Martin A. Schmidt

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We present the design and experimental analysis of a dielectrophoretic trap composed of four microfabricated gold posts excited in a quadrupolar fashion. Using quantitative modeling tools, we have designed these extruded traps to attain strong holding against flow while being constrained by a set of system parameters. The extruded geometry consists of(More)
We have developed a microfabricated device for use in parallel luminescent single-cell assays that can sort populations upon the basis of dynamic functional responses to stimuli. This device is composed of a regular array of noncontact single-cell traps. These traps use dielectrophoresis to stably confine cells and hold them against disrupting fluid flows.(More)
The Alliance for Cellular Signaling is a large-scale collaboration designed to answer global questions about signalling networks. Pathways will be studied intensively in two cells--B lymphocytes (the cells of the immune system) and cardiac myocytes--to facilitate quantitative modelling. One goal is to catalyse complementary research in individual(More)
A single-crystal silicon air turbine supported on gas lubricated bearings has been operated in a controlled and sustained manner at rotational speeds greater then 1 million rpm and power levels approaching 5 W. The device is a second-generation version of the microbearing rig first reported by Lin et al. [1], and is the first micromachine to operate at(More)
—A high-resolution accelerometer with a bulk-micro-machined silicon proof mass and an interferometric position sensor was developed for measuring vibratory accelerations. The inter-ferometer consists of interdigitated fingers that are alternately attached to the proof mass and support substrate. Illuminating the fingers with coherent light generates a(More)
We demonstrate a promising type of microfabricated accelerometer that is based on the optical interferometer. The interferometer consists of surface-micromachined interdigital fingers that are alternately attached to a proof mass and support substrate. Illuminating the fingers with coherent light generates a series of diffracted optical beams. Subangstrom(More)
A quantitative model capturing Deep Reactive Ion Etch (DRIE) pattern density effects is presented. Our previous work has explored the causes of wafer-level variation and demonstrated die-level interactions resulting from pattern density and reactant species consumption [1]. Several reports have focused on experimental evidence and modeling of feature-level(More)