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One of the most pervasive problems afflicting people throughout the world is inadequate access to clean water and sanitation. Problems with water are expected to grow worse in the coming decades, with water scarcity occurring globally, even in regions currently considered water-rich. Addressing these problems calls out for a tremendous amount of research to(More)
We present a novel microfabrication process for realizing a new type of flexible sensory "smart skin". In this work, we focus on demonstration of a skin containing a two dimensional array of tactile sensors using polyimide and metal strain gauges. A novel polymer microfabrication approach coupled with surface release methods is demonstrated. The process(More)
The design and fabrication of a multilayered polymer micro-nanofluidic chip is described that consists of poly(methylmethacrylate) (PMMA) layers that contain microfluidic channels separated in the vertical direction by polycarbonate (PC) membranes that incorporate an array of nanometre diameter cylindrical pores. The materials are optically transparent to(More)
Silicon-based dielectric thin films such as SiO 2 and Si 3 N 4 are commonly used as insulation layers in electrostatic microactuators to protect the device from short circuiting if the electrodes are in contact. However, dielectric films can store bulk and/or surface static charges. In this paper, the effect that these static charges have on the force(More)
—This paper describes a new bidirectional high-pressure gas electrostatic microvalve that opens and closes in 50 µs or less. The microvalve consists of a valve-closing electrode, a flexible movable membrane, and a valve-opening electrode that is directly opposed to the valve-closing electrode. The membrane contains an embedded electrode, so the valve can(More)
Dielectrophoretic separation of particles finds a variety of applications in the capture of species such as cells, viruses, proteins, DNA from biological systems, as well as other organic and inorganic contaminants from water. The ability to capture particles is constrained by poor volumetric scaling of separation force with respect to particle diameter, as(More)
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