Marek E. Schmidt

We don’t have enough information about this author to calculate their statistics. If you think this is an error let us know.
1Mike Cooke
1Harold M H Chong
1Cigang Xu
Learn More
This paper reports on large area, metal-free deposition of nanocrystalline gra-phene (NCG) directly onto wet thermally oxidized 150 mm silicon substrates using parallel-plate plasma-enhanced chemical vapor deposition. Thickness non-uniformities as low as 13% are achieved over the whole substrate. The cluster size L a of the as-obtained films is determined(More)
  • 1