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applies and teaches advanced methodologies of design and analysis to solve complex, hierarchical, heterogeneous and dynamic problems of engineering technology and systems for industry and government. ABSTRACT Cluster tools are highly integrated machines that can perform a sequence of semiconductor manufacturing processes. Their integrated nature can(More)
Simulation models are useful to predict and understand the impact of changes to a manufacturing system. Typical factory simulation models include the parts being manufactured in the factory and the people and resources processing and handling the parts. However, these models do not include equipment or process details, which can affect operational(More)
applies and teaches advanced methodologies of design and analysis to solve complex, hierarchical, heterogeneous and dynamic problems of engineering technology and systems for industry and government. Abstract Cluster tools are highly integrated machines that can perform a sequence of semiconductor manufacturing processes. The sequence of wafer handler moves(More)
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