Maja Balarin

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Silicon epitaxial wafers, consisting of 280 μm thick n-type substrate layer and 4–5 μm thick epi-taxial layer, were electrochemically etched in hydrofluoric acid ethanol solution, to produce porous silicon samples. The resistivity of epitaxial layer was 1 Ω cm, while the substrate was much better conductor with resistivity 0.015 Ω cm. By varying the etching(More)
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