Mahesh Angira

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This paper presents the design, analysis and simulation of metal-to metal contact series rf-MEMS switch for its pull-in voltage optimization. Fixed - fixed flexure is used as a switching element and the Pull-in voltage is optimized for generating a force to obtain a stable contact resistance. Au is used as the contact material. The simulated value of the(More)
This paper presents detail analysis of MEMS Fixed Fixed beam resonator. Force voltage analogy is being used here for calculating electrical two port equivalent circuit and its component values. Its resonance frequency tuning behavior analyzed by varying dc bias voltages ranging from 0 V to 10 V. The resonant frequency variation with varying elctode air gap(More)
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