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Two microelectromechanical systems (MEMS) curled-plate variable capacitors, built in 0.35-mum CMOS technology, are presented. The plates of the presented capacitors are intentionally curled upward to control the tuning performance. A newly developed maskless post-processing technique that is appropriate for MEMS/CMOS circuits is also presented. This(More)
A microelectromechanical systems (MEMS) variable capacitor having two movable plates loaded with a nitride layer is proposed. A trench in the silicon substrate underneath the capacitor is used to decrease the parasitic capacitance. The use of an insulation dielectric layer on the bottom plate of the MEMS capacitor increases the capacitor's tuning range and(More)
A novel parallel-plate MEMS variable capacitor with a thin-film vertical comb actuator is proposed. The actuator can vertically displace both plates of the capacitor. Making use of the fringing held, this actuator exhibits linear displacement behavior, caused by the induced electrostatic force between the actuator's electrodes. The proposed capacitor has a(More)
A microelectromechanical systems (MEMS) variable capacitor having additional carrier beams is proposed. The use of carrier beams makes it possible to obtain an equivalent nonlinear spring constant, which increases the capacitor's tuning range and prevents the top plate from collapsing at a tuning range of 50%. A lumped element model and a continuous model(More)
A novel mm-wave MEMS phase shifter based on a slow wave structure is introduced. The phase shifter uses co-planer wave guide that has the signal line loaded with inductors through capacitive coupling. The inductor and the capacitive coupling capacitor are designed to work for the mm-wave frequency range. Integrated metal to metal RF MEMS switches are(More)
Surface micromachining technology implemented by the PolyMUMPs process is used to fabricate on-chip RF microelectromechanical systems (MEMS) components. Parasitic effects due to coupling to the low-resistivity silicon substrate are eliminated by the introduction of a customized wet etching post-processing technique. The maskless post-processing technique(More)
Latching RF MEMS Switches of Single-Pole-Single-Throw (SPST), Single-Pole-Double-Throw (SPDT) and Single-Pole-Triple-Throw (SP3T) types are proposed. The switches are built of a 20 μm thick nickel layer covered with a plated 2 μm gold on the top and side walls of nickel layer eliminating any potential warping due to thermal mismatch. The(More)
A novel nickel/gold based electroplated 4-bit RF MEMS phase shifter is designed, fabricated and tested. The proposed design can candle high power and utilizes CPW transmission lines that use 8 latching SPDT RF MEMS switches that can work at 80°K. The design is based on 4 cascaded phase shifting units where every unit has two different electrical(More)
This paper proposes a nonlinear model and reports the current-voltage (I–V) characteristics of a thermally driven V-shaped MEMS actuator with a folded spring (FS) reference beam. The nonlinear lumped element model is developed using circuit elements with temperature-dependent material properties. In addition, it is shown experimentally that the Joule(More)
A novel CPW based phase shifter that relies on automatic collapse of capacitive switches is designed, fabricated and tested. The novel design of the phase shifter is due to a novel CPW topology and automatic collapse mechanical design that is designed to operate at several and gradual collapse voltages. The novelty of the CPW has been achieved through the(More)