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Single-crystal diamond, with its unique optical, mechanical and thermal properties, has emerged as a promising material with applications in classical and quantum optics. However, the lack of heteroepitaxial growth and scalable fabrication techniques remains the major limiting factors preventing more wide-spread development and application of diamond… (More)
Optical nanocavities (racetrack resonators and photonic crystal cavities) are fabricated in bulk single-crystal diamond via angled-etching. Devices operating in the telecom band exhibited Q-factors exceeding 10<sup>5</sup>, while devices in the visible yielded Q-factors approaching 10<sup>4</sup>.