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A new type of tri-axial piezoelectric accelerometer is proposed in this study. It consists of a seismic mass and four cantilever beams that is distributed in a shape of X. Analytical model and FEM analysis were conducted to study its charge sensitivity and the fundamental/first order resonance frequency in the Z-axis, X-axis and Y-axis direction. The errors(More)
A piezoelectric accelerometer based on bulk micromachining was presented in this paper. It is composed of a mass block and four cantilever beams with PZT piezoelectric thin films for detection deposited on cantilever beams. In order to realize the multi-axis detection with a single mass block, beam deformations due to the acceleration in X, Y, Z-axis(More)
A piezoelectric accelerometer based on d33 mode was studied in this work. It is comprised of multiple cantilever beams to support a central seismic mass. The piezoelectric PZT thin films and interdigital (IDT) electrodes are designed to be deposited on the surface of beams. The PZT thin film was in-plane polarized and worked in d33 mode. The accelerometer(More)
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