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Nanometer resolution of three-dimensional motions using video interference microscopy

• W. Hemmert, M.S. Mermelstein, D. M. Freeman
• Technical Digest. IEEE International MEMS 99…
• 1999

An interferometric video system for measuring microelectromechanical systems (MEMS) with nanometer resolution is demonstrated. Interferograms are generated by combining light reflected from the… (More)

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