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The aging of tungsten filaments and its effect on wire surface kinetics in hot-wire chemical vapor deposition
Wire-desorbed radicals present during hot-wire chemical vapor deposition growth have been measured by quadrupole mass spectrometry. New wires produce Si as the predominant radical for temperaturesExpand
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Gas phase and surface kinetic processes in polycrystalline silicon hot-wire chemical vapor deposition
Experiments and numerical simulations have been conducted to determine critical parameters for growth of polycrystalline silicon via hot-wire chemical vapor deposition. Reactor-scale simulationsExpand
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Sintering of TiB2-Al composites using HP-HT method
Purpose: The subject of the work was to study the effect of the sintering temperature on the properties and structure of TiB2-Al composites. Design/methodology/approach: TiB2-Al composites reinforcedExpand
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Gas Phase and Surface Kinetic Processes in Hot-Wire Chemical Vapor Deposition
One- and two-dimensional numerical simulations have been used to determine the parameters critical to high rate growth of high quality polycrystalline silicon via hot-wire chemical vapor depositionExpand