• Publications
  • Influence
Proposal of a new structural thermal vacuum sensor with diode-thermistors combined with a micro-air-bridge heater
TLDR
New structural Pirani gauge-type thermal vacuum sensor with a microheater and two pn junction diodes, Th-A and Th-B, as a high-sensitive temperature sensor working like a thermistor formed on a micro-air-bridge (MAB) is proposed. Expand
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Tunable multilayer‐film distributed‐Bragg‐reflector filter
The periodic multilayers of dielectric materials such as polystyrene/collodion or polystyrene/polyvinyl alcohol were fabricated by means of alternately dropping these solutions onto a spinner. AsExpand
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Thermistor-like pn junction temperature-sensor with variable sensitivity and its combination with a micro-air-bridge heater
Abstract A new type temperature-sensor of pn junction diode and micro-air-bridge heater combined with this one, are proposed and demonstrated. This pn junction diode temperature-sensor can cover veryExpand
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Vibration sensor using optical-fiber cantilever with bulb-lens
Abstract A new design of a bulb-lens for emitted light collimation and a vibration sensor based on an optical-fiber cantilever with a bulb-lens fabricated using the silicon micro fabricationExpand
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A new method to measure the absolute — humidity independently of the ambient temperature
Abstract A new method to measure the absolute humidity independently of the ambient temperature T a is proposed and demonstrated using a thermal humidity sensor with only a single micro-air-bridgeExpand
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Vanadium oxide thermal microsensor integrated in a microfluidic chip for detecting cholesterol and glucose concentrations
A highly sensitive thermal measurement device based on a vanadium oxide (VOx) microthermistor is developed for detecting biological molecules based on enzymatic reactions. The measurement principleExpand
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Absolute-humidity sensing independent of the ambient temperature
Abstract A new method for measuring the absolute humidity independently of the ambient temperature T a is proposed and demonstrated using a thermal humidity sensor with only a single micro-air-bridgeExpand
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Application of the air-bridge microheater to gas detection
Abstract A new type of gas sensor with very fast response and high sensitivity, which can detect the thermal conductivity change in a known ambient gas due to mixing with a gas of different thermalExpand
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Thermistor-like pn diode temperature-sensor and a new method to measure the absolute humidity using these temperature-sensors combined with a microheater
  • M. Kimura, K. Kikuchi
  • Materials Science
  • Proceedings of IEEE Sensors (IEEE Cat. No…
  • 22 October 2003
We have developed a temperature-sensor of pn junction diode and a microheater combined with this temperature-sensor. This pn junction diode temperature sensor can cover very wide temperature-range ofExpand
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Manufacturing and characterization of simple cantilever thermal biosensor with Si-Metal thermocouple structure for enzymatic reaction detection
Abstract We have proposed thin film cantilever thermal biosensor with simple thermocouple structure. Silicon as a high seebeck coefficient material is used to fabricate high sensitivity thermalExpand
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