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- Publications
- Influence
Effect of twin boundaries and structural polytypes on electron transport in GaAs
- Xiaofeng Qian, M. Kawai, H. Goto, J. Li
- Materials Science
- 1 October 2015
Abstract As-grown GaAs nanowires often possess high density of twin boundaries and stacking faults, which serve as scattering planes for electrons. Here, using density functional theory and Green’s… Expand
Interlayered dielectric planarization with TEOS-CVD and SOG
- M. Kawai, K. Matsuda, K. Miki, K. Sakiyama
- Materials Science
- . Proceedings., Fifth International IEEE VLSI…
- 13 June 1988
Spin-on-glass (SOG) and TEOS-CVD based methods were examined in connection with the planarization of the intermediate dielectric between lower and upper aluminum connections. TEOS-based PECVD and… Expand
Significant improvement in electromigration of reflow-sputtered Al-0.5wt%Cu/Nb-liner dual damascene interconnects with low-k organic SOG dielectric
- T. Usui, T. Watanabe, Sachiyo Ito, M. Hasunuma, M. Kawai, H. Kaneko
- Materials Science
- IEEE International Reliability Physics Symposium…
- 23 March 1999
Reflow-sputtered Al-0.5wt%Cu/Nb-liner dual damascene interconnects with low-k organic spin-on glass (SOG) passivation were fabricated for the first time. A significant improvement in median… Expand
Magnetotransport study of sub-100 nm line-and-space structure: Weiss oscillation in a short period planar structure
- M. Yamaguchi, M. Kawai, Y. Inagaki, Y. Arashima, N. Sawaki, E. Gornik
- Physics
- 1 December 1999
Abstract Planar nano-structures (sub-100 nm period line-and-space structures) are fabricated with 100 kV EB lithography system and their magnetoresistance perpendicular and parallel to the… Expand