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Effect of twin boundaries and structural polytypes on electron transport in GaAs
Abstract As-grown GaAs nanowires often possess high density of twin boundaries and stacking faults, which serve as scattering planes for electrons. Here, using density functional theory and Green’sExpand
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Interlayered dielectric planarization with TEOS-CVD and SOG
Spin-on-glass (SOG) and TEOS-CVD based methods were examined in connection with the planarization of the intermediate dielectric between lower and upper aluminum connections. TEOS-based PECVD andExpand
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Significant improvement in electromigration of reflow-sputtered Al-0.5wt%Cu/Nb-liner dual damascene interconnects with low-k organic SOG dielectric
Reflow-sputtered Al-0.5wt%Cu/Nb-liner dual damascene interconnects with low-k organic spin-on glass (SOG) passivation were fabricated for the first time. A significant improvement in medianExpand
  • 3
Magnetotransport study of sub-100 nm line-and-space structure: Weiss oscillation in a short period planar structure
Abstract Planar nano-structures (sub-100 nm period line-and-space structures) are fabricated with 100 kV EB lithography system and their magnetoresistance perpendicular and parallel to theExpand