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Summary form only given. Nanosize Si-tip arrays with gated electrodes have been fabricated using self-aligned method. In order to have parallel electron beam (high perveance beam) toward the anode plate, we have designed a nanosize tip array with heights of the tip slightly less than that of a gate electrode. High perveance beam is supposed to provide a(More)
There have been great interests in developing micromachined cantilever stylus, scanning probe based chemical sensor, including thermal probe Sensor and nano-resolution mass and molecule detectors. The microfabricated cantilevers offer various possibilities as chemical sensors such as nanocalorimeters on high resolution mass detectors based on resonance(More)
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