M. Shavezipur

Learn More
Microstructures with flexible and stretchable properties display tremendous potential applications including integrated systems, wearable devices and bio-sensor electronics. Hence, it is essential to develop an effective method for fabricating curvilinear and flexural microstructures. Despite significant advances in 2D stretchable inorganic structures,(More)
The effect of flexibility and initial curvature of moving plates in parallel-plate MEMS capacitors are investigated. A parallel-plate-based MEMS tunable capacitor with extended tunability and linear capacitance-voltage (C-V) response is introduced. The design combines the flexibility and curvature of the electrode with an array of mechanical stoppers to(More)
A novel fishbone-shape parallel-plate-based capacitor with high tunability and linear C-V response is presented. The electrodes consist of a set of lateral cantilever beams of different lengths, attached to a longitudinal fixed-fixed beam. An insulating layer prevents contact between the electrodes. When a DC voltage is applied, the longitudinal and lateral(More)
  • 1