M. Puech

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3D stacking of die with TSV (through Silicon Via) connection as well as wafer level packaging of CMOS image sensors (CIS) are becoming very hot topics. While TSV of CIS is definitively a back-end technique, 3D stacking of die through TSV can be done with different strategies: from the via first approach, a front-end process, to the via last approach, a(More)
Biography Michel Puech is the Application Manager of the Micro Machining Systems Product Group with Alcatel Vacuum Technology France. He joined Alcatel Vacuum Technology France in 1981 as graduated engineer of INSA of Toulouse, France. Michel Puech has been involved in the development of three generations of Plasma Etching Systems for the past 22 years and(More)
We have obtained deep spectroscopic observations of several nearby gamma-ray burst (GRB) host galaxies revealing for the first time the presence of Wolf-Rayet (WR) stars and numerous O stars located in rich and compact clusters or star forming regions. Surprisingly, high spatial resolution imaging shows that the GRBs and the associated supernovae did not(More)
We present a bulk micromachining technology, based on vertical trench isolation, for fabrication of two-level MEMS in a standard monocrystalline silicon substrate. The technology, suitable for full integration with on-chip electronics, employs doublc-side processing to obtain functional micromechanical structures on both sides of the substrate. Etching and(More)
One of the prominent science goal of the ELTs will be to study the physics and mass assembly of galaxies at very high redshifts. Here, we present the galaxy evolution science case for EAGLE, which is a NIR multi-integral field spectrograph for the E-ELT currently under phase A study. We summarize results of simulations conducted to derive high-level(More)
We give an overview of the science case for spectroscopy of resolved stellar populations beyond the Local Group with the European Extremely Large Telescope (E-ELT). In particular, we present science simulations undertaken as part of the EAGLE Phase A design study for a multi–integral-field-unit, near-infrared spectrograph. EAGLE will exploit the(More)
In this paper, we present a first comparison of different Adaptive Optics (AO) concepts to reach a given scientific specification for 3D spectroscopy on Extremely Large Telescope (ELT). We consider that a range of 30% − 50% of Ensquarred Energy (EE) in H band (1.65µm) and in an aperture size from 25 to 100mas is representative of the scientific(More)
— Abstract. A precise derivation of the evolution of the Tully Fisher is crucial to understand the interplay between dark matter and baryonic matter in cosmological models, Using 15 deployable integral field units of FLAMES/GIRAFFE at VLT, we have recovered the velocity fields of 35 galaxies at intermediate redshift (0.4 < z < 0.75). This facility is able(More)
Elucidating the processes that governed the assembly and evolution of galaxies over cosmic time is one of the main objectives of all of the proposed Extremely Large Telescopes (ELT). To make a leap forward in our understanding of these processes, an ELT will want to take advantage of Multi-Objects Adaptive Optics (MOAO) systems, which can substantially(More)
Using the multi-integral field spectrograph GIRAFFE at VLT, we have derived the K-band Tully-Fisher relation (TFR) at z ∼ 0.6 in a representative sample of 65 galaxies with emission lines (W 0 (OII) ≥ 15Å). We confirm that the scatter of the z ∼ 0.6 TFR is caused by galaxies with anomalous kinematics, and find a positive and strong correlation between the(More)