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3D stacking of die with TSV (through Silicon Via) connection as well as wafer level packaging of CMOS image sensors (CIS) are becoming very hot topics. While TSV of CIS is definitively a back-end technique, 3D stacking of die through TSV can be done with different strategies: from the via first approach, a front-end process, to the via last approach, a(More)
This paper presents two recent developments in deep silicon etching for MEMS applications using an Alcatel ICP deep dry etching system. In the first part of the paper, a new technique for doubling the state-of-the-art Trench Aspect Ratio from 30 to 60 is introduced. Results are presented showing submicron 0.4 μm wide trenches etched to a depth of 24 μm. In(More)
A precise derivation of the evolution of the Tully Fisher is crucial to understand the interplay between dark matter and baryonic matter in cosmological models, Using 15 deployable integral field units of FLAMES/GIRAFFE at VLT, we have recovered the velocity fields of 35 galaxies at intermediate redshift (0.4 < z < 0.75). This facility is able to recover(More)
We present a bulk micromachining technology, based on vertical trench isolation, for fabrication of two-level MEMS in a standard monocrystalline silicon substrate. The technology, suitable for full integration with on-chip electronics, employs doublc-side processing to obtain functional micromechanical structures on both sides of the substrate. Etching and(More)
Context. Using the multi-integral field spectrograph GIRAFFE at VLT, we have recently derived the stellar-mass Tully-Fisher Relation (smTFR) at z ∼ 0.6 in a representative sample of 63 emission line galaxies. We have found that the distant relation is roughly shifted by a factor two toward smaller masses compared with the local relation. Aims. We extent the(More)
We have obtained deep spectroscopic observations of several nearby gamma-ray burst (GRB) host galaxies revealing for the first time the presence of Wolf-Rayet (WR) stars and numerous O stars located in rich and compact clusters or star forming regions. Surprisingly, high spatial resolution imaging shows that the GRBs and the associated supernovae did not(More)
Context. This paper prepares a series of papers analysing the Intermediate MAss Galaxy Evolution Sequence (IMAGES) up to a redshift of one. Intermediate mass galaxies (MJ ≤ −20.3) are selected from the Chandra Deep Field South (CDFS) for which we identify a serious lack of spectroscopically determined redshifts. Aims. Our primary aim in this study is(More)
Elucidating the processes that governed the assembly and evolution of galaxies over cosmic time is one of the main objectives of all of the proposed Extremely Large Telescopes (ELT). To make a leap forward in our understanding of these processes, an ELT will want to take advantage of Multi-Objects Adaptive Optics (MOAO) systems, which can substantially(More)