M. Puech

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3D stacking of die with TSV (through Silicon Via) connection as well as wafer level packaging of CMOS image sensors (CIS) are becoming very hot topics. While TSV of CIS is definitively a back-end technique, 3D stacking of die through TSV can be done with different strategies: from the via first approach, a front-end process, to the via last approach, a(More)
Biography Michel Puech is the Application Manager of the Micro Machining Systems Product Group with Alcatel Vacuum Technology France. He joined Alcatel Vacuum Technology France in 1981 as graduated engineer of INSA of Toulouse, France. Michel Puech has been involved in the development of three generations of Plasma Etching Systems for the past 22 years and(More)
We have obtained deep spectroscopic observations of several nearby gamma-ray burst (GRB) host galaxies revealing for the first time the presence of Wolf-Rayet (WR) stars and numerous O stars located in rich and compact clusters or star forming regions. Surprisingly, high spatial resolution imaging shows that the GRBs and the associated supernovae did not(More)
Luminous Compact Galaxies are enigmatic sources by many aspects. They can reach the luminosity of the Milky Way within a radius of only a few kpc. They also represent one of the most rapidly evolving populations of galaxies since they represent up to 1/5 of the luminous galaxies at redshift z = 0.7 while being almost absent in the local Universe. The(More)
We present a bulk micromachining technology, based on vertical trench isolation, for fabrication of two-level MEMS in a standard monocrystalline silicon substrate. The technology, suitable for full integration with on-chip electronics, employs doublc-side processing to obtain functional micromechanical structures on both sides of the substrate. Etching and(More)
One of the prominent science goal of the ELTs will be to study the physics and mass assembly of galaxies at very high redshifts. Here, we present the galaxy evolution science case for EAGLE, which is a NIR multi-integral field spectrograph for the E-ELT currently under phase A study. We summarize results of simulations conducted to derive high-level(More)
We give an overview of the science case for spectroscopy of resolved stellar populations beyond the Local Group with the European Extremely Large Telescope (E-ELT). In particular, we present science simulations undertaken as part of the EAGLE Phase A design study for a multi–integral-field-unit, near-infrared spectrograph. EAGLE will exploit the(More)
We used the moderately high spectral resolution of FLAMES/GIRAFFE (R=10000) to derive electron densities from [OII] line ratios in 6 galaxies at z ∼ 0.55. These measurements have been done through the GIRAFFE multiple integral field units and are the very first mapping of electron densities in such distant objects. This allows us to confirm an outflow and(More)
In this paper, we present a first comparison of different Adaptive Optics (AO) concepts to reach a given scientific specification for 3D spectroscopy on Extremely Large Telescope (ELT). We consider that a range of 30% − 50% of Ensquarred Energy (EE) in H band (1.65µm) and in an aperture size from 25 to 100mas is representative of the scientific(More)
— Abstract. A precise derivation of the evolution of the Tully Fisher is crucial to understand the interplay between dark matter and baryonic matter in cosmological models, Using 15 deployable integral field units of FLAMES/GIRAFFE at VLT, we have recovered the velocity fields of 35 galaxies at intermediate redshift (0.4 < z < 0.75). This facility is able(More)