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A two-dimensional etching simulator named ESPRIT (FOOTNOTE: ESPRIT--Etching Simulation PRogram with an Improved sTring model.) has been developed to simulate LSI patterning. The etching simulator includes isotropic and anisotropic components. Its calculation method is based on the string model. ESPRIT can simulate etched profiles for multilayers with(More)
A new two-dimensional integrated process simulation system named SPIRIT-I (Simulation Processor for Integrated Representation of Impurity-profile and Topography-I) has been developed. This system includes elementary process simulators of deposition, lithography, etching, ion implantation, diffusion, and oxidation. SPIRIT features a closely coupled(More)
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