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Ni/sub 80/Fe/sub 20/ and Ni/sub 80/Co/sub 20/ alloys anisotropic magneto-resistive sensor films were deposited by plasma spray. The resistivity (/spl rho/) of the films is determined to be 40-70 /spl mu//spl Omega//spl middot/cm in the as-sprayed state. The oxygen impurity dissolved in the metal acts as a strong scattering center and results in higher(More)
We report our recent work on thick-film permalloy (NiFe) and NiCo-alloy anisotropic magnetoresistive (AMR) sensors made by thermal spray. Various sensor layouts have been fabricated and characterized. The AMR effect of 2.45% and 2.68% is obtained in as-sprayed permalloy and NiCo-alloy sensors. Resistivity of thermal-sprayed thick film is 40-60 /spl mu//spl(More)
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