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The design and experimental validation of a pseudo-elliptical response filter at W-Band is presented. A micromachining technique based on the thick SU-8 photo-resist is used to construct the filter. The optimized structure is specially well-suited for the implementation of filters with transmission zeros by means of micromachining techniques, since the(More)
In this letter, we report the fabrication of 2 /spl times/ 2 crosspoint switches, which monolithically integrate passive waveguides, electro-absorption modulators and optical amplifiers onto one chip using sputtered SiO/sub 2/ quantum-well intermixing technique. The switches have low insertion loss to be about 4-5 dB and extinction ratios up to 26 dB.
A useful development of the sputtered SiO/sub 2/ intermixing technique is reported, which uses a single stage of sputtered SiO/sub 2/ deposition and annealing to achieve precise tuning of the bandgap energy in the InGaAs-AlInGaAs material system. The blue shift of photoluminescence spectra can be varied in the range of 0-160 nm. Bandgap-tuned lasers were(More)
This paper discusses a new micromachined rectangular coaxial line to ridge waveguide transition operating in the frequency range from 60 to 90 GHz. The micromachining techniques are used to provide accurate device dimensions for millimeter wave distributed circuits. A 50 Ω coaxial line output is coupled to a relatively high impedance ridge waveguide.(More)
This paper presents a micromachined patch antenna array with an integrated 2×2 Butler matrix (BM) beamformer. It was designed at 63 GHz and simulated using CST Microwave Studio 3D simulator. The BM is made using a low loss air filled rectangular coaxial line. The structure is constructed by bonding five layers of gold coated photoresist SU-8, each(More)
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