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We have studied postgrowth annealing effects on photoluminescence from strained GaSb quantum dots grown on silicon-on-insulator substrate. A sharp line associated with {311} defects dominates the PL spectra when annealed at above 600 /spl deg/C.
This paper aimed to evaluate the applicability of adiabatic humidification in the heating, ventilation, and air conditioning (HVAC) systems of semiconductor cleanrooms. Accurate temperature and humidity control are essential in semiconductor cleanrooms and high energy consumption steam humidification is commonly used. Therefore, we propose an adiabatic(More)
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