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This paper reports a switchable metamaterial working at terahertz (THz) regime, which is realized by using MEMS fabrications. The resonance induced by 2.60-THz incidence is switched by reconfiguring the metamaterial element, which is analyzed using the coupled oscillators model. The resonance switching of the metamaterial has potential applications, such as(More)
A dual-silicon-nanowires based nanoelectromechanical (NEMS) switch is fabricated using standard complementary metal-oxide-semiconductor (CMOS) compatible process. The switch comprises a capacitive paddle and two silicon nanowires both connect with the paddle, form a U-shape structure. The high electrostatic force generated from the large capacitive paddle(More)
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