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The stability of resonant frequency for single wafer, thin film encapsulated silicon MEMS resonators was investigated for both long term operation and temperature cycling. The resonant frequencies of encapsulated resonators were periocidcally measured at 25°C ± 0.1°C for > 9,000 hours, and the resonant frequency variation remained within the measurement(More)
Silicon MEMS resonators have great potential for on-chip high frequency signal applications. This paper compares methods of sensing the temperature of an encapsulated silicon MEMS resonator and using this temperature measurement to stabilize the temperature, and hence the resonant frequency, of the resonator. The use of external Pt RTDs, integrated Si(More)
In this paper, the temperature compensation of AlN Lamb wave resonators using edge-type reflectors is theoretically studied and experimentally demonstrated. By adding a compensating layer of SiO2 with an appropriate thickness, a Lamb wave resonator based on a stack of AlN and SiO2 layers can achieve a zero first-order temperature coefficient of frequency(More)
This paper presents an investigation of the longterm frequency stability of wafer-scale encapsulated silicon MEMS resonators. Two aspects of stability were examined: long-term stability over time and temperature-related hysteresis. Encapsulated resonators were tested over a period of 8,000 hours in constant environmental temperature of 25°C ± 0.1°C. No(More)
This paper investigates the effects of dielectric charge on resonant frequency in thermally oxidized silicon resonators hermetically encapsulated using “epi-seal.” SiO2 coatings are effective for passive temperature compensation of resonators but make the devices more susceptible to charging-related issues. We present a theoretical model for the(More)
Encapsulated micromechanical resonator technology is becoming important as a potential replacement for quartz for several applications. In this work we report the nonlinear characterization, particularly the A-f effect, in these resonators. The A-f effect in quartz has been well studied in the 1970’s and 1980’s [1, 2], as it dictates the maximum power(More)
Micromechanical Resonator based oscillators are a promising technology for replacing quartz crystal based oscillators. In this work, we will report the effects of mechanical vibrations and bias voltage noise on the phase noise performance of electrostatic MEMS resonator based oscillators. Accurate models for both these effects are discussed along with their(More)
Two types of single-crystal silicon micromechanical resonators having resonant frequencies at 150 kHz and 130 kHz were tested under harsh environment to investigate stability. To observe long-term stability, the main characteristics, such as resonant frequency and quality factor were measured over 2,500 hrs continuously while maintaining constant(More)
This paper presents a dual-resonator design which, not only enables temperature sensing of the resonators but also acts as a general-purpose temperature sensor. The frequency stability of the temperature compensated resonator depends on the accuracy with which the temperature of the resonator is measured. The dual-resonator design, described here, produces(More)